Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/27/2000
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Application #:
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09150300
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Filing Dt:
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09/09/1998
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Inventor:
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TETSU OSAWA
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Title:
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SINGLE-SUBSTRATE-HEAT-TREATMENT APPARATUS IN SEMICONDUCTOR PROCESSING SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| MINATO-KU |
| 3-6 AKASAKA 5-CHOME |
| TOKYO 107-8481, JAPAN |
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| OBLON, SPIVAK, MCCLELLAND, ET AL. |
| MARVIN J. SPIVAK |
| 1755 JEFFERSON DAVIS HIGHWAY, 4TH FLOOR |
| ARLINGTON, VA 22202 |
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