Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/25/2000
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Application #:
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09044279
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Filing Dt:
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03/19/1998
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Inventors:
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KYU-HWAN CHANG, JAE-INH SONG, HEUNG-SOO PARK, YOUNG-BUM KOH
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Title:
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IN-SITU CLEANING APPARATUSES FOR WAFERS USED IN INTEGRATED CIRCUIT DEVICES AND METHODS OF CLEANING USING THE SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 416 MAETAN-DONG, PALDAL-GU |
| SUWON-CITY, KYUNGKI-DO, KOREA, REPUBLIC OF |
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| MYERS BIGEL SIBLEY & SAJOVEC |
| MITCHELL S. BIGEL |
| P.O. BOX 37428 |
| RALEIGH, NC 27627 |
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