Patent Assignment Abstract of Title
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
Total Assignments:
1
|
|
Patent #:
|
|
Issue Dt:
|
08/08/2000
|
Application #:
|
09148563
|
Filing Dt:
|
09/04/1998
|
|
Inventors:
|
JIAW-REN SHIH, BI-LING LIN, HUEY-LIANG HWANG
|
|
Title:
|
PROCESSS TO IMPROVE TEMPERATURE UNIFORMITY DURING RTA BY DEPOSITION OF IN SITU POLY ON THE WAFER BACKSIDE
|
|
|
Assignment:
1
|
|
|
|
|
|
|
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
|
|
|
|
|
|
|
|
|
| 121 PARK AVE. 3 SCIENCE-BASED INDUSTRIAL PARK |
| HSIN-CHU, TAIWAN R.O.C |
|
|
|
|
| GEORGE O. SAILE |
| 20 MCINTOSH DRIVE |
| POUGHKEEPSIE, NY 12603 |
|
|
Search Results as of:
06/22/2024 08:24 AM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
