Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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10/17/2000
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Application #:
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09204940
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Filing Dt:
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12/03/1998
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Inventor:
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YOSHIKATSU KOJIMA
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Title:
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METHOD OF IMPLEMENTING ELECTRON BEAM LITHOGRAPHY USING UNIQUELY POSITIONED ALIGNMENT MARKS AND A WAFER WITH SUCH ALIGNMENT MARKS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 7-1, SHIBA 5-CHOME |
| MINATO-KU, TOKYO, JAPAN |
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| FOLEY, HOAG & ELIOT LLP |
| DONALD W. MUIRHEAD |
| PATENT GROUP |
| ONE POST OFFICE SQUARE |
| BOSTON, MA 02109-2170 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1753 SHIMONUMABE, NAKAHARA-KU |
| KAWASAKI, KANAGAWA 211-8668, JAPAN |
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| SUGHRUE MION, PLLC |
| 2100 PENNSYLVANIA AVENUE, N.W. |
| WASHINGTON, DC 20037 |
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