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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
11/21/2000
Application #:
09027608
Filing Dt:
02/23/1998
Inventors:
NOBUO MATSUKI, JOHANNES BART CORNELIS VAN DER HILST
Title:
METHOD OF MANUFACTURING FLUORINE-CONTAINING SILICON OXIDE FILMS FOR SEMICONDUCTOR DEVICE
Assignment: 1
Reel/Frame:
009310/0365Recorded: 07/13/1998Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
03/26/1998
Exec Dt:
03/28/1998
Assignee:
TAMA-SHI
23-1, NAGAYAMA 6-CHOME
TOKYO, JAPAN
Correspondent:
KNOBBE, MARTENS, OLSON ET AL.
GORDON H. OLSON
620 NEWPORT CENTER DRIVE, 16TH FLOOR
NEWPORT BEACH, CA 92660

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