Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/28/2000
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Application #:
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09281335
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Filing Dt:
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03/30/1999
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Inventors:
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RENN-SHYAN YEH, DER-FANG HUANG, CHAO-HSIN CHANG, CHIH-CHIEN HUNG
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Title:
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METHOD FOR DETERMINING A CAUSE FOR DEFECTS IN A FILM DEPOSITED ON A WAFER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SCIENCE-BASED INDUSTRIAL PARK |
| NO. 121 PARK AVENUE 3 |
| HSIN-CHU, R.O.C., TAIWAN |
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| TUNG & ASSOCIATES |
| RANDY W. TUNG |
| 838 W. LONG LAKE ROAD |
| SUITE 120 |
| BLOOMFIELD HILLS, MICHIGAN 48302 |
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