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Patent Assignment Abstract of Title

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Total Assignments: 1

Patent #:	6156663	Issue Dt:	12/05/2000	Application #:	08721732	Filing Dt:	09/27/1996
Inventors:	KATSUYA WATANABE, SABURO KANAI, RYOJI HAMASAKI, TSUYOSHI YOSHIDA, YUTAKA OMOTO et al
Title:	METHOD AND APPARATUS FOR PLASMA PROCESSING

Assignment: 1

Reel/Frame:

008260/0258

Recorded: 09/27/1996

Pages: 2

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignors:

WATANABE, KATSUYA

Exec Dt:

09/18/1996

KANAI, SABURO

Exec Dt:

09/18/1996

HAMASAKI, RYOJI

Exec Dt:

09/18/1996

YOSHIDA, TSUYOSHI

Exec Dt:

09/18/1996

OMOTO, YUTAKA

Exec Dt:

09/10/1996

KOJIMA, MASAYUKI

Exec Dt:

09/11/1996

SASABE, SYUNJI

Exec Dt:

09/12/1996

KANEKIYO, TADAMITSU

Exec Dt:

09/18/1996

ISHIZU, TAKAZUMI

Exec Dt:

09/18/1996

Assignee:

HITACHI, LTD.

6, KANDA SURUGADAI 4-CHOME

CHIYODA-KU, TOKYO, JAPAN

Correspondent:

ANTONELLI, TERRY, STOUT & KRAUS

WILLIAM I. SOLOMON

1300 NORTH 17TH ST.

SUITE 1800

ARLINGTON, VA 22209

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