Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/12/2000
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Application #:
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09110923
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Filing Dt:
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07/06/1998
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Inventors:
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DOUGLAS M. REBER, STEPHEN J. FONASH
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Title:
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LOW TEMPERATURE, HIGH QUALITY SILICON DIOXIDE THIN FILMS DEPOSITED USING TETRAMETHYLSILANE (TMS)
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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304 OLD MAIN |
UNIVERSITY PARK, PENNSYLVANIA 16802 |
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THE PENNSYLVANIA STATE UNIVERSITY |
THOMAS J. MONAHAN |
113 TECHNOLOGY CENTER |
INTELLECTUAL PROPERTY OFFICE |
UNIVERSITY PARK, 16802-7000 |
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