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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
12/19/2000
Application #:
09141947
Filing Dt:
08/28/1998
Inventors:
HEING YI TSENG, MASON JUANG
Title:
APPARATUS AND METHOD FOR PREVENTING CHAMBER CONTAMINATION
Assignment: 1
Reel/Frame:
009439/0468Recorded: 08/28/1998Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
06/16/1998
Exec Dt:
06/16/1998
Assignee:
SCIENCE-BASED INDUSTRIAL PARK
NO. 121 PARK AVENUE 3
HSIN-CHU, TAIWAN
Correspondent:
TUNG & ASSOCIATES
RANDY W. TUNG
838 W. LONG LAKE ROAD, SUITE 120
BLOOMFIELD HILLS, MI 48302

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