Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/16/2001
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Application #:
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09282534
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Filing Dt:
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03/31/1999
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Inventors:
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STEPHEN N. GOLOVATO, ROBERT W. MILGATE III, PAUL LOUIS CONSOLI
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Title:
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METHOD AND APPARATUS FOR INSTULATING A HIGH POWER RF ELECTRODE THROUGH WHICH PLASMA DISCHARGE GASES ARE INJECTED INTO A PROCESSING CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 107, JAPAN |
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| WOOD, HERRON & EVANS, L.L.P. |
| KURT A. SUMME |
| 2700 CAREW TOWER, 441 VINE STREET |
| CINCINNATI, OH 45202 |
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