Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/13/2001
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Application #:
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09435334
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Filing Dt:
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11/05/1999
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Inventors:
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JOSEPH WU, SHENG-FEN CHIU, JOSEPH S SHIAO
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Title:
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METHOD FOR IMPROVING GLOBAL PLANARIZATION UNIFORMITY OF A SILICON NITRIDE LAYER USED IN THE FORMATION OF TRENCHES BY USING A SANDWICH STOP LAYER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SCIENCE-BASED INDUSTRIAL PARK |
| 19, LI-HSIN ROAD |
| HSINCHU, TAIWAN R.O.C |
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| SCIENCE-BASED INDUSTRIAL PARK |
| 19 LI-HSIN ROAD |
| HSINCHU, TAIWAN R.O.C |
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| SCIENCE-BASED INDUSTRIAL PARK |
| WITTELSBACHERPLATZ 2, D-80333 |
| MUCHEN, GERMANY |
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| BLAKELY SOKOLOFF TAYLOR & ZAFMAN, LLP |
| CHUN M. NG |
| 12400 WILSHIRE BLVD., 7TH FLOOR |
| LOS ANGELES, CA 90025 |
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