Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/22/2001
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Application #:
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09103813
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Filing Dt:
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06/24/1998
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Inventors:
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HONGYONG ZHANG, MASAYUKI SAKAKURA, YUUGO GOTO
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Title:
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CLEANING METHOD AND CLEANING APPARATUS OF SILICON
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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398, HASE, ATSUGI-SHI |
KANAGAWA-KEN, JAPAN 243-0 |
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SIXBEY, FRIEDMAN, LEEDOM & FERGUSON, PC |
GERALD J. FERGUSON, JR. |
2010 CORPORATE RIDGE, SUITE 600 |
MCLEAN, VIRGINIA 22102 |
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