Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/29/2001
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Application #:
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09277526
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Filing Dt:
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03/26/1999
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Inventor:
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JOZEF BRCKA
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Title:
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PROCESS APPARATUS AND METHOD FOR IMPROVING PLASMA DISTRIBUTION AND PERFORMANCE IN AN INDUCTIVELY COUPLED PLASMA
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6 AKASAKA 5-CHOME MINATO-KU |
| TOKYO 107, JAPAN |
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| WOOD, HERRON & EVANS, L.L.P. |
| KURT A. SUMME |
| 2700 CAREW TOWER |
| 441 VINE STREET |
| CINCINNATI, OHIO 45202 |
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