Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/26/2001
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Application #:
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09206892
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Filing Dt:
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12/08/1998
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Inventors:
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LEPING LI, JAMES ALBERT GILHOOLY, CLIFFORD OWEN MORGAN, CONG WEI
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Title:
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REAL-TIME CONTROL OF CHEMICAL-MECHANICAL POLISHING PROCESSING BY MONITORING IONIZATION CURRENT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NEW ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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| INTERNATIONAL BUSINESS MACHINES CORP. |
| JAY H. ANDERSON |
| 1580 ROUTE 52 |
| DEPT. 18G/BLDG. 300-482 |
| HOPEWELL JUNCTION, NEW YORK 12533 |
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