Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/24/2001
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Application #:
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09104030
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Filing Dt:
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06/24/1998
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Inventors:
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YU-HUA LEE, JAMES(CHENG-MING) WU
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Title:
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METHOD FOR IMPROVING CHEMICAL/MECHANICAL POLISH UNIFORMITY OVER ROUGH TOPOGRAPHY FOR SEMICONDUCTOR INTEGRATED CIRCUITS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SCIENCE-BASED INDUSTRIAL PARK |
| 121 PARK AVE. 3 |
| HSIN-CHU, R.O.C., TAIWAN |
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| GEORGE O. SAILE |
| 20 MCINTOSH DRIVE |
| POUGHKEEPSIE, NY 12603 |
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