Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/28/2001
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Application #:
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08963197
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Filing Dt:
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11/03/1997
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Inventors:
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HISAHARU OBINATA, TETSUJI KIYOTA, SATORU TOYODA, YOSHIYUKI KADOKURA
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Title:
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SPUTTERING APPARATUS FOR FILLING PORES OF A CIRCULAR SUBSTRATE
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Assignment:
1
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CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).
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| 2500 HAGISONO, CHIGASAKI-SHI |
| KANAGAWA-KEN, JAPAN |
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| LARSON & TAYLOR, PLC |
| 1199 NORTH FAIRFAX ST |
| SUITE 900 |
| ALEXANDRIA, VA 22314-1437 |
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