Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/18/2001
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Application #:
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09326665
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Filing Dt:
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06/07/1999
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Inventors:
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MOSHE FINAROV, DAVID SCHEINER, AVI RAVID
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Title:
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METHOD AND APPARATUS FOR MONITORING A CHEMICAL MECHANICAL PLANARIZATION PROCESS APPLIED TO METAL-BASED PATTERNED OBJECTS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O.B., 266 |
| WEIZMANN SCIENTIFIC PARK |
| REHOVOT 76100, ISRAEL |
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| BROWDY AND NEIMARK, P.L.L.C. |
| NORMAN J. LATKER |
| 419 SEVENTH STREET, SUITE 300 |
| WASHINGTON, D.C. 20004 |
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