Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/23/2001
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Application #:
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09351586
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Filing Dt:
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07/12/1999
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Inventors:
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JEFFREY D. WOMACK, VUONG P. NGUYEN, DEVENDRA KUMAR, JACK S. KASAHARA, SOKOL IBRANI
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Title:
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THERMAL PROCESSING CHAMBER FOR HEATING AND COOLING WAFER-LIKE OBJECTS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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322 LAKE HAZELTINE DRIVE |
CHASKA, MINNESOTA 55318 |
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FAEGRE & BENSON LLP |
MARK W. BINDER |
90 SOUTH SEVENTH STREET |
2200 NORWEST CENTER |
MINNEAPOLIS, MN 55402-3901 |
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