Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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10/23/2001
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Application #:
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09444815
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Filing Dt:
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11/22/1999
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Inventors:
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ERICH MERZ, JOCHEN BECKER
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Title:
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OPTICAL SYSTEM, IN PARTICULAR PROJECTION-ILLUMINATION UNIT USED IN MICROLITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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D-89518 HEIDENHEIM, GERMANY |
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WELSH & KATZ, LTD. |
GERALD T. SHEKLETON |
120 SOUTH RIVERSIDE PLAZA/22ND FLOOR |
CHICAGO, ILLINOIS 60603-3913 |
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Assignment:
2
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CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).
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CARL-ZEISS-STRASSE 22 |
OBERKOCHEN, GERMANY D-73447 |
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WELSH & KATZ, LTD. |
GERALD T. SHEKLETON |
120 SOUTH RIVERSIDE PLAZA |
22ND FLOOR |
CHICAGO, IL 60606 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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CARL-ZEISS-STRASSE 22 |
OBERKOCHEN, GERMAN DEMOCRATIC REPUBLIC 73447 |
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GERALD T. SHEKLETON |
WELSH & KATZ, LTD. |
120 SOUTH RIVERSIDE PLAZA |
22ND FLOOR |
CHICAGO, ILLINOIS 60606 |
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