Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/30/2001
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Application #:
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09784065
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Filing Dt:
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02/16/2001
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Inventors:
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Ramkumar Subramanian, Fei Wang, Todd P. Lukanc, Lynne A. Okada
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Title:
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Method for using a CVD organic barc as a hard mask during via etch
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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P.O. BOX 3453 |
ONE AMD PLACE |
SUNNYVALE, CALIFORNIA 94088 |
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MCDERMOTT, WILL & EMERY |
WESLEY L. STRICKLAND |
600 13TH STREET, N.W. |
WASHINGTON, DC 20005 |
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