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Patent Assignment Abstract of Title
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Total Assignments: 4
Patent #:
6312854
Issue Dt:
11/06/2001
Application #:
09270052
Filing Dt:
03/16/1999
Inventors:
J. FUNG CHEN, ROGER CALDWELL, TOM LAIDIG, KURT E. WAMPLER
Title:
METHOD OF PATTERNING SUB-0.25 LAMBDA LINE FEATURES WITH HIGH TRANSMISSION, "ATTENUATED" PHASE SHIFT MASKS
Assignment: 1
Reel/Frame:
010003/0874Recorded: 06/02/1999Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
CHEN, J. FUNG
Exec Dt:
05/04/1999
CALDWELL, ROGER
Exec Dt:
05/06/1999
LAIDIG, TOM
Exec Dt:
05/07/1999
WAMPLER, KURT E.
Exec Dt:
05/07/1999
Assignee:
MICROUNITY SYSTEMS ENGINEERING, INC.
475 POTRERO AVENUE
SUNNYVALE, CALIFORNIA 94086
Correspondent:
MCDERMOTT, WILL & EMERY
MICHAEL E. FOGARTY, ESQ.
600 13TH ST. NW
SUITE 1200
WASHINGTON, DC 20006
Assignment: 2
Reel/Frame:
011120/0593Recorded: 08/11/2000Pages: 7
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
MICROUNITY SYSTEMS ENGINEERING, INC.
Exec Dt:
07/02/1999
Assignee:
ASM LITHOGRAPHY HOLDING, N.V.
P.O. BOX 324
VELDHOVEN, NETHERLANDS 5500
Correspondent:
MCDERMOTT, WILL & EMERY
MICHAEL E. FOGARTY
600 13TH STREET, N.W.
WASHINGTON, DC 20005
Assignment: 3
Reel/Frame:
011128/0170Recorded: 08/14/2000Pages: 6
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
ASM LITHOGRAPHY HOLDING, N.V.
Exec Dt:
12/31/1999
Assignee:
ASML MASKTOOLS NETHERLANDS B.V.
P.O. BOX 324
VELDHOVEN, NETHERLANDS 5500
Correspondent:
MCDERMOTT, WILL & EMERY
MICHAEL E. FOGARTY
600 13TH STREET, N.W.
WASHINGTON, DC 20005
Assignment: 4
Reel/Frame:
032170/0425Recorded: 02/07/2014Pages: 21
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
ASML MASKTOOLS B.V.
Exec Dt:
12/20/2013
Assignee:
ASML NETHERLANDS B.V.
DE RUN 6501
VELDHOVEN, NETHERLANDS NL-5504 DR
Correspondent:
PILLSBURY WINTHROP SHAW PITTMAN, LLP
P.O. BOX 10500
MCLEAN, VA 22102

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