Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/06/2001
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Application #:
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09390135
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Filing Dt:
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09/03/1999
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Inventors:
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BARNEY M. COHEN, JINGANG SU, KENNY KING-TAI NGAN, JR-JYAN CHEN
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Title:
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CLEANING CONTACT WITH SUCCESSIVE FLUORINE AND HYDROGEN PLASMAS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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P.O. BOX 450-A |
SANTA CLARA, CALIFORNIA 95052 |
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APPLIED MATERIALS, INC. |
ROBERT W. MULCAHY |
PATENT COUNSEL |
P.O. BOX 450-A |
SANTA CLARA, CA 95052 |
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