Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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11/13/2001
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Application #:
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09539114
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Filing Dt:
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03/30/2000
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Inventors:
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Michihiko Yanagisawa, Shinya Iida, Yasuhiro Horiike
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Title:
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Corrision-resistant system and method for a plasma etching apparatus
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4TH FLOOR |
| 747 THIRD AVENUE |
| NEW YORK, NEW YORK 10017 |
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| BLANK ROME COMISKY & MCCAULEY LLP |
| DAVID EDMONDSON |
| THE FARRAGUT BUILDING |
| SUITE 1000, 900 17TH STREET, NW |
| WASHINGTON, DC 20006 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| MICHIGAN STATE UNIVERSITY |
| 238 ADMINISTRATION BLDG |
| EAST LANSING, MICHIGAN 48824 |
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| MCLEOD & MOYNE, P.C. |
| IAN C. MCLEOD |
| 2190 COMMONS PARKWAY |
| OKEMOS, MI 48864 |
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