Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/11/2001
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Application #:
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09553694
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Filing Dt:
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04/21/2000
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Inventors:
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Kenneth E. Balish, Thomas Nowak, tsutomu Tanaka, Mark Beals
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Title:
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Dilute remote plasma clean
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450A |
| LEGAL AFFAIRS DEPARTMENT |
| SANTA CLARA, CALIFORNIA 95052 |
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| APPLIED MATERIALS, INC. |
| ROBERT W. MULCAHY, PATENT COUNSEL |
| LEGAL AFFAIRS DEPARTMENT |
| P.O. BOX 450A, M/S 2061 |
| SANTA CLARA, CALIFORNIA 95052 |
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