Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/11/2001
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Application #:
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09470153
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Filing Dt:
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12/22/1999
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Inventors:
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BOYD J. WIEDENMAN, BIAO WU
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Title:
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COMPOSITIONS AND METHODS FOR THE SELECTIVE ETCHING OF TANTALUM-CONTAINING FILMS FOR WAFER RECLAMATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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322 LAKE HAZELTINE DRIVE |
CHASKA, MINNESOTA 55318 |
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FAEGRE & BENSON LLP |
KIMBERLY S. JORDAHL |
2200 NORWEST CENTER |
90 SOUTH SEVENTH STREET |
MINNEAPOLIS, MN 55402-3901 |
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