Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/01/2002
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Application #:
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09314631
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Filing Dt:
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05/19/1999
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Inventors:
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TIEN-JUI LIU, LING-HSIN TSENG
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Title:
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METHOD AND APPARATUS FOR REDUCING PARTICLE CONTAMINATION ON WAFERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 3,LI-HSIN RD. 2, SCIENCE BASED INDUSTRIAL PARK |
| HSIN-CHU CITY, TAIWAN R.O.C |
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| BACON & THOMAS |
| EUGENE MAR |
| 625 SLATERS LANE |
| ALEXANDRIA, VA 22314 |
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