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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
01/01/2002
Application #:
09351259
Filing Dt:
07/12/1999
Inventors:
YING HOLDEN, RENE GEORGE, ROBERT GUERRA, LAIZHONG LUO, ALLAN WIESNOSKI, NICOLE KUHL et al
Title:
SYSTEMS AND METHODS FOR TWO-SIDED ETCH OF A SEMICONDUCTOR SUBSTRATE
Assignment: 1
Reel/Frame:
010913/0988Recorded: 06/19/2000Pages: 11
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
03/22/2000
Exec Dt:
05/30/2000
Exec Dt:
03/20/2000
Exec Dt:
03/13/2000
Exec Dt:
05/08/2000
Exec Dt:
04/04/2000
Exec Dt:
03/15/2000
Exec Dt:
03/27/2000
Assignee:
3550 WEST WARREN AVENUE
FREMONT, CALIFORNIA 94538
Correspondent:
WILSON SONSINI GOODRICH & ROSATI
MICHAEL J. MURPHY
650 PAGE MILL ROAD
SR 1-2
PALO ALTO, CA 94304-1050

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