Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/15/2002
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Application #:
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09300095
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Filing Dt:
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04/27/1999
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Publication #:
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Pub Dt:
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10/25/2001
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Inventor:
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MARK R. TESAURO
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Title:
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VACUUM LOADLOCK ULTRA VIOLET BAKE FOR PLASMA ETCH
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1310 ELECTRONICS DRIVE |
| CARROLLTON, TEXAS 75006 |
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| FELSMAN, BRADLEY, VADEN ET AL. |
| DANIEL E. VENGLARIK |
| 201 MAIN STREET, SUITE 1600 |
| FORT WORTH, TEXAS 76102 |
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