Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/05/2002
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Application #:
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09322198
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Filing Dt:
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05/28/1999
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Inventors:
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JULIA S. SVIRCHEVSKI, KATRINA A. MIKHAYLICH
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Title:
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METHOD AND SYSTEM FOR CLEANING A CHEMICAL MECHANICAL POLISHING PAD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054-3299 |
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PATTERSON & SHERIDAN, L.L.P. |
3040 POST OAK BLVD., SUITE 1500 |
HOUSTON, TX 77056-6582 |
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