Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/12/2002
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Application #:
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09702052
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Filing Dt:
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10/30/2000
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Inventors:
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Richard H. Livengood, Paul Winer, Gary Woods, Michael DiBattista
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Title:
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Method and apparatus for controlling material removal from a semiconductor substrate using induced current endpointing
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2625 WALSH AVENUE |
| SANTA CLARA, CALIFORNIA 95051 |
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| SCHWEGMAN, LUNDBERG, WOESSNER & KLUTH,P. |
| ANN M. MCCRACKIN |
| P.O. BOX 2938 |
| MINNEAPOLIS, MN 55402 |
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