Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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04/30/2002
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Application #:
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09573253
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Filing Dt:
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05/18/2000
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Inventors:
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YUNLONG LI, MASANOBU SATO, YOSHIO TOMINAGA, NORIYOSHI SATO, SATORU IIZUKA
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Title:
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PLASMA GENERATING APPARATUS AND SEMICONDUCTOR MANUFACTURING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 14-20, 3-CHOME, HIGASHI-NAKANO |
| NAKANO-KU, TOKYO 164-8511, JAPAN |
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| 4-17-113, KADAN, AOBA-KU |
| SENDAI-SHI, MIYAGI-KEN 980-0815, JAPAN |
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| OLIFF & BERRIDGE, PLC |
| JAMES A. OLIFF |
| P.O. BOX 19928 |
| ALEXANDRIA, VA 22320 |
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Assignment:
2
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CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).
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| 14-20, HIGASHINAKANO 3-CHOME, NAKANO-KU |
| TOKYO, JAPAN |
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| OLIFF & BERRIDGE, PLC |
| JAMES A. OLIFF |
| P.O. BOX 19928 |
| ALEXANDRIA, VIRGINIA 22320 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-4, KANDAKAJI-CHO |
| CHIYODA-KU |
| TOKYO, JAPAN 101-0045 |
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| VOLPE & KOENIG, P.C. |
| 30 SOUTH 17TH STREET |
| SUITE 1800 |
| PHILADELPHIA, PA 19103 |
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