Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/30/2002
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Application #:
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09473795
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Filing Dt:
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12/28/1999
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Inventors:
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Alexander I. Ershov, Eckehard D. Onkels, Palash P. Das, William N. Partlo et al
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Title:
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VERY NARROW BAND INJECTION SEEDED F2 LITHOGRAPHY LASER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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LEGAL DEPARTMENT-MS/3-2A |
16750 VIA DEL CAMPO COURT |
SAN DIEGO, CALIFORNIA 92127 |
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MICHELE TRAVIS C/O CYMER, INC. |
16750 VIA DEL CAMPO COURT |
LEGAL DEPARTMENT-MS/3-2A |
SAN DIEGO, CA 92127 |
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