Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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05/21/2002
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Application #:
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09228930
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Filing Dt:
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01/12/1999
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Inventors:
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JOSEPH BACH, STEPHANE DANA
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Title:
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AFM-BASED LITHOGRAPHY METROLOGY TOOL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2881 SCOTT BOULEVARD, M/S 2061 |
| SANTA CLARA, CALIFORNIA 95050 |
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| SUGHRUE, MION, ZINN, MACPEAK & SEAS |
| DARRYL MEXIC |
| 2100 PENNSYLVANIA AVENUE NW, SUITE 800 |
| WASHINGTON, DC 20037-3202 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450A |
| SANTA CLARA, CALIFORNIA 95052 |
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| APPLIED MATERIALS, INC. |
| PETER J. YIM |
| 2881 SCOTTS BLVD. |
| SANTA CLARA, CA 95050 |
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