Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/28/2002
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Application #:
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09334046
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Filing Dt:
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06/15/1999
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Inventors:
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WILLIAM D. JONES, ROBERT C. ROWAN, EDWARD L. SILL, THOMAS J. LICATA
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Title:
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PROCESS APPARATUS AND METHOD FOR IMPROVED PLASMA PROCESSING OF A SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6 AKASAKA 5-CHOME MINATO-KU |
| TOKYO 107, JAPAN |
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| WOOD, HERRON & EVANS, L.L.P. |
| KURT A. SUMME |
| 2700 CAREW TOWER |
| 441 VINE STREET |
| CINCINNATI, OH 45202 |
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