Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/11/2002
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Application #:
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09793314
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Filing Dt:
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02/26/2001
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Publication #:
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Pub Dt:
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12/13/2001
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Inventors:
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Gyu-Hwan Kwag, Hyun Han, Ki-Heum Nam
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Title:
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PROCESS TUBE HAVING SLIT TYPE PROCESS GAS INJECTION PORTION AND HOLE TYPE WASTE GAS EXHAUST PORTION, AND APPARATUS FOR FABRICATING SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 416, MAETAN-DONG, PALDAL-GU |
| SUWON-CITY, KYUNGKI-DO, KOREA, REPUBLIC OF |
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| SAMUELS, GAUTHIER & STEVENS LLP |
| ANTHONY P. ONELLO, JR. |
| 225 FRANKLIN STREET, SUITE 3300 |
| BOSTON, MA 02110 |
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