Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/02/2002
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Application #:
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09300583
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Filing Dt:
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04/27/1999
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Inventors:
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JOHN J. HAUTALA, JOHANNES F.M. WESTENDORP
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Title:
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PECVD OF TA FILMS FROM TANTALUM HALIDE PRECURSORS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| TBS BROADCAST CENTER 3-6 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 107, JAPAN |
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| WOOD, HERRON & EVANS, L.L.P. |
| BEVERLY A. LYMAN, PH.D., ESQUIRE |
| 2700 CAREW TOWER |
| 441 VINE STREET |
| CINCINNATI, OHIO 45202 |
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