Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/23/2002
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Application #:
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09676462
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Filing Dt:
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09/29/2000
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Inventor:
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Shu Nakajima
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Title:
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APPARATUS AND METHODS FOR ACTIVELY CONTROLLING RF PEAK-TO-PEAK VOLTAGE IN AN INDUCTIVELY COUPLED PLASMA ETCHING SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| MARTINE PENILLA & KIM, LLP |
| PETER B. MARTINE |
| 710 LAKEWAY DRIVE, SUITE 170 |
| SUNNYVALE, CALIFORNIA 94085 |
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