Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/23/2002
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Application #:
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10050697
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Filing Dt:
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01/18/2002
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Publication #:
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Pub Dt:
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06/20/2002
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Inventors:
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Licheng M. Han, Yi Xu, Joseph Zhiefeng Xie, Simon Chooi, Mei Sheng Zhou
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Title:
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USE OF BORON CARBIDE AS AN ETCH-STOP AND BARRIER LAYER FOR COPPER DUAL DAMASCENE METALLIZATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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60 WOODLANDS INDUSTRIAL PARK D |
STREET 2 |
SINGAPORE, SINGAPORE 738406 |
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11 SCIENCE PARK ROAD |
SINGAPORE SCIENCE PARK II |
SINGAPORE, SINGAPORE 117685 |
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SAILE ACKERMAN LLC |
28 DAVIS AVENUE |
POUGHKEEPSIE, NY 12603 |
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