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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
07/30/2002
Application #:
09324080
Filing Dt:
06/01/1999
Inventors:
AKIRA TAKEISHI, HIDEO MITSUHASHI, KATSUHISA OHKAWA, YOSHIHIRO HAYASHI, TAKAHIRO ONODERA
Title:
POLISHING PROCESS MONITORING METHOD AND APPARATUS, ITS ENDPOINT DETECTION METHOD, AND POLISHING MACHINE USING SAME
Assignment: 1
Reel/Frame:
010026/0451Recorded: 06/02/1999Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
05/31/1999
Exec Dt:
05/31/1999
Exec Dt:
05/31/1999
Exec Dt:
05/31/1999
Exec Dt:
05/31/1999
Assignee:
7-1 SHIBA 5-CHOME, MINATO KU
TOKYO, JAPAN
Correspondent:
LAFF, WHITESEL, CONTE & SARET, LTD.
J. WARREN WHITESEL
401 NORTH MICHIGAN AVENUE
CHICAGO, ILLINOIS 60611-4212

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