Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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08/06/2002
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Application #:
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09589029
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Filing Dt:
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06/06/2000
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Inventors:
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Marian Mankos, Steven T. Coyle, Tai-Hon Philip Chang, Andres Fernandez
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Title:
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MULTIPLE BEAM ELECTRON BEAM LITHOGRAPHY SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| LEGAL AFFAIRS DEPT. |
| P.O. BOX 450A |
| SANTA CLARA, CALIFORNIA 95052 |
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| APPLIED MATERIALS, INC. |
| ROBERT W. MULCAHY |
| P.O. BOX 450A |
| LEGAL AFFAIRS DEPT. |
| SANTA CLARA, CA 95052 |
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Assignment:
2
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CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS).
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| OFFICE OF NAVAL RESEARCH |
| 800 NORTH QUINCY STREET |
| ARLINGTON, VIRGINIA 22217 |
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| JEAN TRUMAN |
| OFFICE OF NAVAL RESEARCH |
| OFFICE OF COUNSEL |
| 800 NORTH QUINCY STREET |
| ARLINGTON, VA 22217-5660 |
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