Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/13/2002
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Application #:
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09687163
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Filing Dt:
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10/16/2000
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Inventors:
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Shuo-Yen Tai, Ming-Cheng Yang, Jiun-Fang Wang, Champion Yi
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Title:
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METHOD FOR INTEGRATION OPTIMIZATION BY CHEMICAL MECHANICAL PLANARIZATION END-POINTING TECHNIQUE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SCIENCE BASED INDUSTRIAL PARK |
| NO. 19, LI HSIN ROAD |
| HSIN-CHU, TAIWAN R.O.C |
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| GEORGE O. SAILE |
| 20 MCINTOSH DRIVE |
| POUGHKEEPSIE, NY 12603 |
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