Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/20/2002
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Application #:
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09323011
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Filing Dt:
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06/01/1999
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Inventor:
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MICHAEL S. GORDON
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Title:
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CHARGED PARTICLE BEAM PROJECTION LITHOGRAPHY WITH VARIABLE BEAM SHAPING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| OHI PLANT 6-3, NISHI-OHI 1-CHOME, SHINAGAWA-KU |
| TOKYO, JAPAN 140-6 |
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| WHITHAM, CURTIS & WHITHAM |
| MARSHALL M. CURTIS |
| RESTON INTERNATIONAL CENTER, SUITE 900 |
| 11800 SUNRISE VALLEY DRIVE |
| RESTON, VIRGINIA 20191 |
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