Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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08/27/2002
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Application #:
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09893475
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Filing Dt:
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06/29/2001
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Inventors:
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Martin Commons, Tobias Mono, Velt Klee, John Pohl, Paul Wensley
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Title:
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METHOD OF MEASURING COMBINED CRITICAL DIMENSION AND OVERLAY IN SINGLE STEP
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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1730 NORTH FIRST STREET |
SAN JOSE, CALIFORNIA 95112 |
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INFINEON TECHNOLOGIES NORTH AMERICA CORP |
C/O SIEMENS CORPORATION |
ELSA KELLER |
186 WOOD AVENUE SOUTH |
ISELIN, NJ 08830 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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ST. MARTIN-STR. 53 |
8154 MUNICH, GERMANY |
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SIEMENS CORPORATION |
ELSA KELLER |
INTELLECTUAL PROPERTY DEPARTMENT |
186 WOOD AVENUE SOUTH |
ISELIN, NJ 08830 |
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