Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/17/2002
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Application #:
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09255489
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Filing Dt:
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02/23/1999
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Publication #:
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Pub Dt:
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03/07/2002
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Inventors:
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JIONG-PING LU, BOYANG LIN, WEI-YUNG HSU
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Title:
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PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION OF A NUCLEATION LAYER IN A TUNGSTEN METALLIZATION PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 655474, MS 3999 |
| DALLAS, TEXAS 75265 |
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| TEXAS INSTRUMENTS INCORPORATED |
| MARK A. VALETTI |
| P.O. BOX 655474, MS 3999 |
| DALLAS, TX 75265 |
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