Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/05/2002
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Application #:
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09514063
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Filing Dt:
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02/25/2000
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Inventor:
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Javad J. Sahbari
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Title:
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PLASMA ETCHING RESIDUE REMOVAL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 455 FOREST STREET |
| MARLBOROUGH, MASSACHUSETTS 01752 |
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| DIKE, BRONSTEIN, ROBERTS & CUSHMAN, LLP |
| S. MATTHEW CAIRNS |
| 130 WATER STREET |
| BOSTON, MA 02109 |
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