Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/03/2002
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Application #:
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10138143
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Filing Dt:
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05/02/2002
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Publication #:
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Pub Dt:
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09/19/2002
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Inventors:
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David Alan Baldwin, Todd Lanier Hylton
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Title:
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SYSTEM AND METHOD FOR PERFORMING SPUTTER DEPOSITION USING A DIVERGENT ION BEAM SOURCE AND A ROTATING SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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500 PENDLETON STRRET |
ALEXANDRIA, VIRGINIA 22314 |
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DANIEL H. GOLUB |
1701 MARKET ST. |
PHILA., PA 19103 |
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