Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/03/2002
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Application #:
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09830633
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Filing Dt:
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04/30/2001
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Inventors:
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Yuichi Wada, Hisashi Yarita, Hisashi Aida, Naomi Yoshida
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Title:
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FILM DEPOSITION METHOD AND APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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MCDERMOTT, WILL & EMERY |
ARTHUR J. STEINER |
600 13TH STREET N.W. |
WASHINGTON, DC 20005 |
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