Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/03/2002
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Application #:
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09650961
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Filing Dt:
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08/29/2000
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Inventors:
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Amit S. Kelkar, Michael D. Whiteman
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Title:
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METHOD OF FORMING PRE-METAL DIELECTRIC FILM ON A SEMICONDUCTOR SUBSTRATE INCLUDING FIRST LAYER OF UNDOPED OXIDE OF HIGH OZONE: TEOS VOLUME RATIO AND SECOND LAYER OF LOW OZONE DOPED BPSG
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2325 ORCHARD PARKWAY |
| SAN JOSE, CALIFORNIA 95131 |
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| LAW OFFICES OF THOMAS SCHNECK |
| THOMAS SCHNECK |
| P.O. BOX 2-E |
| SAN JOSE, CA 95109-0005 |
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