Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/24/2002
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Application #:
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10037026
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Filing Dt:
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01/02/2002
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Inventors:
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Kenneth K. Barber, Mark Fissel, Soo Yun Joh, Mukul Khosla, Karl B. Levy, Robert Martinson et al
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Title:
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APPARATUS AND METHOD FOR ENHANCED DEGASSING OF SEMICONDUCTOR WAFERS FOR INCREASED THROUGHPUT
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3970 NORTH FIRST STREET |
SAN JOSE, CALIFORNIA 95134 |
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DELIO & PETERSON, LLC |
ROBERT CURCIO |
121 WHITNEY AVENUE |
NEW HAVEN CT, 0651-1241 |
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