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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
6500321
Issue Dt:
12/31/2002
Application #:
09519429
Filing Dt:
03/02/2000
Inventors:
KAIHAN A ASHTIANI, LARRY D HARTSOUGH, RICHARD S HILL, KARL B LEVY, ROBERT M MARTINSON
Title:
CONTROL OF EROSION PROFILE AND PROCESS CHARACTERISTICS IN MAGNETRON SPUTTERING BY GEOMETRICAL SHAPING OF THE SPUTTERING TARGET
Assignment: 1
Reel/Frame:
010661/0281Recorded: 03/06/2000Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
ASHTIANI, KAIHAN A.
Exec Dt:
02/01/2000
HARTSOUGH, LARRY D.
Exec Dt:
02/01/2000
HILL, RICHARD S.
Exec Dt:
01/27/2000
MARTINSON, ROBERT M.
Exec Dt:
02/15/2000
LEVY, KARL B.
Exec Dt:
02/01/2000
Assignee:
NOVELLUS SYSTEMS, INC.
4000 N. FIRST STREET
SAN JOSE, CALIFORNIA 95134
Correspondent:
DELIO & PETERSON, LLC
BARBARA BROWNE
121 WHITNEY AVENUE
NEW HAVEN, CT 06510-1241

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